Thickness monitors TM13 & TM14
The TM13 and TM14 devices comprise: quartz oscillator, frequency measuring system and communication interface.
Categories: Electronics, For Deposition
- Description
- Technical Data
- Features
- Options
Description
It is connected to the input element of a quartz resonator. The measurement results are transmitted via RS232 to the master device: either a PC or TMC13 controller. Remote control via TMC13 controller or PC. Available software dedicated for precise rate measurements. Registers changes in the frequency of the quartz resonator in time (in the form of a graph). Allows the user to calculate the evaporation rate from the selected time interval. Suitable for e.g. MBE applications.
Power supply | 5V DC | |
---|---|---|
Current consumption | max 500 mA | |
TM13 | TM14 | |
Thickness resolution | 0.1 Å | 0.01 Å |
Rate resolution | 0.1 Å/s | 0.01 Å/s |
Frequency resolution | 0.1 Hz | 0.01 Hz |
Frequency stability | 0.5 ppm | 0.5 ppm |
Number of measurements per second | 4 | 0.5; 1; 2; 4; 10 (selectable) |
Communication Interface | RS232 | |
Dimensions [mm] | 80.0 x 50.0 x 27.0 mm (W x H x D) | |
Weight (approx.) | 0.1 kg |
TM13
- Frequency Resolution: 0.1 Hz
- Number of measurements per second: 4 (fixed)
- Maximum frequency of quartz oscillator: 6 MHz
- Stability: 0.5 ppm
TM14
- Frequency Resolution: 0.01 Hz
- Number of measurements per second: 0.5, 1, 2, 4, 10 (selectable)
- Maximum frequency of quartz oscillator: 6 MHz
- Stability: 0.5 ppm
- Communication interface RS485 (specify at order)