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Stepper motor driven, 2x CF16 flanges, incl. control unit
UHV-Leakvalve ND 3
CF-16 1/4″ flanges on the side and the bottom.
Bakeable up to 300°C (Motor can stay on the valve, but must not be heated).
Metallic seal gold-plated.
Stepper motor driven with controller.
With visual position indicator.
Flow rate 10-9 mbar*l/s to 60 mbar*l/s (even lower when baking out).
Analog-Input (0-10V): Remote sensors (pressure, flow) for closed loop control. Remote sensors are not included.
Digital-Input (USB, Ethernet, Modbus): Via Remote Computer
Touchscreen On the control unit.
Step Resolution 1.000.000 with encoder feedback
Software Updates via Network (Ethernet) or USB.
Power Supply 230 VAC or 24 VDC.
With Controller.
- Description
- Technical Specifications
- Downloads
Description
| Technical Specifications | |
|---|---|
| Material Housing | 1.4404 (316L) |
| Material Sealing | 1.4435 (316L) gold plated |
| Material not in contact with gas | 1.4301 (304) |
| Lifetime | 100,000 cycles until first service |
| Mounting Position | any |
| Internal Pressure | Vacuum to 10 bar |
| Inlet Pressure | 10 bar from each side |
| Tightness Housing | 1*10 -10 mbar.l/s |
| Tightness Valve Seat | 1*10 -10 mbar.l/s |
| Volumes: | |
| Main Flange | 1.0 cm 3 |
| Side Flange | 4.6 cm 3 |
| Weight | 3.8 kg |
| Bakeout Tempertaure: | |
| Valve Open | 450°C |
| Valve Closed or in Operation | 300°C |
| Actuator: | |
| Time to travelk across stroke | 14 seconds |
| Steps / Stroke | 1,000,000 |
| Interfaces | USB Ethernet Modbus Analog |
| Input | Touchscreen |
| Operational Modes | Manual Closed Loop Control Script Commands |
