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Quartz balance QO 40A1
The Quartz Balance QO 40A1 provides a real-time, progressive indication of coating thickness during deposition, for high accuracy and reproducibility in coatings production.
- Description
- Technical Data
- Features
- Options
Description
The thickness of both evaporated and sputter coated films can be monitored. The sensor head is a water cooled, non-magnetic housing which is permanently positioned in the vacuum system. The crystal face is parallel to the water cooling feedthrough pipes. The Quartz Balance QO 40A1 is mounted on a DN 40CF flange with two Ø6 pipes and Microdot S-50 coaxial connector. Customized insertion length 130 – 500 mm (other on request).
| Mounting flange | DN 40CF (rotatable) |
|---|---|
| Max. operation temperature | up to 300°C (with water cooling) |
| Water cooling (required) | water flow > 0.5 l/min temperature: 20 – 30 °C max pressure: 6 bar |
| Crystal frequency | 4.8 – 6 MHz, 14 mm diameter (industry standard) |
| Insertion length | dependent on specification and geometry of the chamber |
| Bakeout temperature | up to 150 °C |
- Water-colled sensor head
- Easy exchangeable quartz
- Customised insertion length
- With or without integrated manual/electro-pneumatic shutterDifferent mounting flanges (e.g. DN 40 KF)
- Other quartz balance geometries on request (e.g. perpendicular head geometry)
- Linear shift
