L600A01

6.0″ MAK Sputter Source Vertical (axial) mount

SKU: L600A01 Category:

Description

Ferrotec Meivac Vertical (axial) mount sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.

Target Diameter 6.0″ (152.4mm)
Magnets Nd/FeB
Max Dc Power 6000W
Max RF Power 2000W
Cathode Voltage (v) 200-1000
Max Discharge Current 10.0 A
Pressure Range (mtorr) 0.5 – 600
Water Flow Rate 2.0 gpm
Min CF Flange Size 10.0″ CF

 

Vertical Source, manually adjustable to substrate distance

Dimension Inches
A Ø 6.55
B 6.75
B-2 *
C Ø 4.50
D 12
D-2 4.5
E Ø 1.25
F 2.3

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