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Description
Ferrotec Meivac Vertical (axial) mount sputter sources are noted for simplicity, ease of use, and resulting high reliability, the MAK sputter source has been designed to present the smallest profile possible and deliver higher deposition rates than any comparable sputter sources.
| Target Diameter | 6.0″ (152.4mm) |
|---|---|
| Magnets | Nd/FeB |
| Max Dc Power | 6000W |
| Max RF Power | 2000W |
| Cathode Voltage (v) | 200-1000 |
| Max Discharge Current | 10.0 A |
| Pressure Range (mtorr) | 0.5 – 600 |
| Water Flow Rate | 2.0 gpm |
| Min CF Flange Size | 10.0″ CF |
Vertical Source, manually adjustable to substrate distance
| Dimension | Inches |
|---|---|
| A | Ø 6.55 |
| B | 6.75 |
| B-2 | * |
| C | Ø 4.50 |
| D | 12 |
| D-2 | 4.5 |
| E | Ø 1.25 |
| F | 2.3 |
