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Ion source IS 40E1
Ion Source IS 40E1 – two lens, extractor type, focused. Suitable for depth profiling (Ar), enables operation with reactive gases like O2, H2, hydrocarbons and all noble gases
- Description
- Technical Data
- Features
- Options
Description
The source is able to raster a 10 mm x 10 mm area of the surface at the recommended working distance. It is particularly suitable for depth profiling in XPS, ISS and SIMS. The source can be also used for sample surface cleaning.
| Mounting flange | DN 40CF (rotatable) |
| Gases | Ar and reactive gases (O2, H2 hydrocarbons with reduced lifetime) |
| Energy range | 0.15 keV – 5 keV |
| Scan area | 10 mm x 10 mm (for working distance of 23 mm) |
| Current density | up to 4 mA / cm2 (for distance 23 mm) |
| Beam current | > 1 μA (for distance 23 mm) |
| Cathode type | yttrium oxide coated iridium filament |
| Small cone angle | 50° |
| Insertion length | 163 mm (standard) |
| FWHM | dependent on working distance (e.g. < 150 μm for distance 23 mm) |
| Typical working distance | 23 – 120 mm |
| Bakeout temperature | 250 °C |
| Working pressure | 10-8 mbar (with max beam current) |
- Specially configured nose cone
- Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
- Continuously variable spot size
- Extremely homogeneous crater/beam profile
- Onside replaceable filament
- UHV gas inlet
- UHV conditions maintained in chamber
- Integrated scan and deflection unit
- Correction of incident electron beam angle (provided by IS40-PS power supply)
- Wien mass filter
- Gas dosing system
- Linear shift: 25, 50, 75, 100 mm
- Pumping set (2 stages)
- Vacuum Gauges set
