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Ion source IS 40C1
Compact, easy-to-use extractor type for sample surface cleaning.
- Description
- Technical Data
- Features
- Options
Description
The source generates an ion current of >70 μA/cm2 (Argon) with Gaussian beam profile. The source insertion length is adaptable to individual requirements (between 62.5 mm – 384.5 mm, other on request).
| Mounting flange | DN 40CF (non-rotatable) |
| Energy range | 0.12 keV – 5 keV |
| Current density | > 120 μA/cm2 (for distance 30 mm) |
| Cathode type | yttrium oxide coated iridium filament |
| Insertion length | min. 62.5 mm, other on request OD: max. 37 mm |
| FWHM | dependent on ion energy and working distance (e.g. 3 mm for distance 30 mm) |
| Typical working distance | 30 – 250 mm |
| Bakeout temperature | up to 250°C |
| Working pressure | 10-5 – 10-6 mbar |
- Operation with inert (Ar) & reactive gases (O2, H2, hydrocarbons with reduced lifetime)
- High Ion Beam Current
- Long lifetime
- High stability
- Gas dosing system
- Customised insertion length
- Linear shift
