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Deposition process controller DPC10
The complete system consists of a DPC10 main electronic unit, a vacuum gauge and TM13/14 thickness monitor for each quartz crystal.
- Description
- Technical Data
- Features
Description
New electronic unit for deposition process controlling. Operates two independent sources/chambers at the same time.
User interacts with unit via front panel touchscreen by selecting/entering parameters defining the process. The device executes any recipe created by the user with a graphical editor. In addition, DPC10 works with any voltage controlled deposition source power supply (via analogue interface) and can control substrate heating process.
The DPC10 Deposition Process Controller is an advanced and complete electronic device designed for the physical vapor deposition process controlling. DPC10 monitors and controls the rate and thickness of thin film deposition. The rate and thickness of the deposition are calculated from the frequency change of the quartz placed in the process chamber. A user-programmed device can control the deposition process in a precise and repeatable manner.
| Supply voltage | 100-240 VAC, 50/60 Hz (power consumption max 43 W) |
|---|---|
| Inputs | 2 analog inputs (0-10V) 12 digital inputs |
| Outputs | 6 analog outputs (0-10V) 16 digital outputs |
| Supported thickness monitors | TM13: 0.1 Hz | TM14: 0.01 Hz |
| Thickness | 0 – 9999000 Å |
| Rate | 0 – 9999 Å/s |
| Frequency range | 2-6 MHz |
| Thickness resolution | TM13: 0.1 Å | TM14: 0.01 Å |
| Rate resolution | TM13: 0.1 Å/s | TM14: 0.01 Å/s |
| Frequency stability | TM13: 0.5 ppm | TM14: 0.5 ppm |
| Tooling factor | 1 – 400% |
| Measurement units | Å, kÅ, nm |
| Measurement period | 100 ms – 2 s (depend on TM type) |
| Shutter control | manual, time, thickness |
| Shutter time | 1 – 1000000 s |
| Supported active gauges | CTR90, TTR91, TTR211, PTR225, PKR251/360/361, PCR280, TPR280/281, PTR90, ITR90, ITR100, Baratron, ANALOG IN, PG105, ATMION, IKR360/361 |
| Measurement units | mbar, Pa, Torr, Psia |
| Communication interface | RS232/485, Ethernet |
| User interface | 7″ TFT display with touchscreen |
| Interface language | English |
| Dimensions | 212.6 x 128.4 x 266.1 mm (W x H x D) |
| Weight (approx.) | 2.1 kg |
- Designed for deposition process automation
- Two independent process loops
- Easily operated recipe editor with graphical interface
- Works with any voltage controlled (via analogue interface) deposition source power supply
- Controls evaporation rate and thickness
- Controls substrate heating process
- Equipped with fast CPU & 7” touchscreeen display
- Favourites list of frequently used materials
- 2D real time chart module
