TRIPLE PREVENTION GATE VALVE
- Triple Prevention Function
- Valve Controller (1CH ~ 4CH)
- Applications: Process with by products such as powder and gas in semiconductor line Prevent back stream
Category: UHV GATE VALVES
- SPECIFICATION
| GATE SEAL TYPE | TRIPLE PREVENTION GATE VALVE |
|---|---|
| Opeation | Pneumatic |
| Flange Size (ID) | 2.5˝ ~ 10˝ (DN63CF, DN100CF, DN160CF, DN200CF, DN250CF) |
| Flange Type | ISO, KF |
| Feedthrough | Welded Bellows |
| Gate Seal | Viton O-Ring / Kalrez O-Ring |
| Bonnet Seal | Viton O-Ring |
| Response Time | ≤ 0.3 sec ~ 0.6 sec |
| Operate Pressure Range | 1.5˝ ~ 6˝ (DN40CF – DN160CF) : 1×10-10 mbar to 1400 mbar 8˝ ~ 10˝ (DN200CF – DN250CF) : 1×10-10 mbar to 1200 mbar |
| Differential pressure on the gate | 1.5˝ ~ 6˝ (DN40CF – DN160CF) : ≤ 1400 mbar 8˝ ~ 10˝ (DN200CF – DN250CF) : ≤ 1200 mbar |
| Leak rate | < 1×10-10 mbar ℓ/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve Body | ≤ 200 °C |
| Temperature for Actuator | ≤ 80 °C |
| Bake Temperature | ≤ 150 °C |
| Materials | Stainless Steel304, AL6061 Anodizing |
| Mounting Position | Any |
| Operating Pressure (N2) | 4 ~ 7 bar |



























