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UHV GATE VALVE
- Low Particle by Ceramic Ball Mechanism
- Easy Maintenance using Repair Parts Kit
- Applications : UHV isolation in research and industry
- SPECIFICATION
| GATE SEAL TYPE | UHV GATE VALVE |
|---|---|
| Opeation | Manual / Pneumatic |
| Flange Size (ID) | 1.5˝ ~ 12˝ (DN40CF, DN63CF, DN100CF, DN160CF, DN200CF, DN250CF) |
| Flange Type | CF |
| Feedthrough | Welded Bellows (AM350 or STS316L) |
| Gate Seal | Viton O-Ring / Kalrez O-Ring / EPDM |
| Bonnet Seal | Cu Gasket |
| Response Time | ≤ 2 sec |
| Operate Pressure Range | 1.5˝ ~ 6˝ (DN40CF – DN160CF) : 1×10-10 mbar to 1400 mbar 8˝ ~ 12˝ (DN200CF – DN250CF) : 1×10-10 mbar to 1200 mbar |
| Differential pressure at opening | ≤ 30 mbar |
| Differential pressure on the gate | 1.5˝ ~ 6˝ (DN40CF – DN160CF) : ≤ 1600 mbar / 8˝ ~ 12˝ (DN200CF – DN250CF) ≤ 1200 mbar |
| Leak rate | < 1×10-10 mbar ℓ/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve Body | ≤ 200 °C |
| Temperature for Actuator | ≤ 150 °C |
| Temperature for Position Indicator | ~ 150 °C |
| Bake Temperature | ≤ 200 °C |
| Materials | Body (Stainless Steel304 or 316L) / Actuator (Al 6061Anodizing) |
| Mounting Position | Any |
| Operating Pressure (N2) | 4 ~ 7 bar |
