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3rd(MULTI) POSITION GATE VALVE
Wide Uniform Erosion Area results in stable operation, minimal distribution & uniformity/rate changes throughout the target lifetime.
- Active Plasma Discharge on nearly entire target surface keeps target clean & reduces insulating film growth that leads to arcing.
- External manifolds & other plasma disturbing hardware that increases required periodic maintenance frequency is unnecessary.
- Available in 2” Diameter Targets.
- Internal and Flange Mount Configurations.
- Can be Used in DC, Pulsed DC, RF Modes.
- 70-90 W t% Target Utilization
- Fully Stochiometric Dielectric Materials at Low Pressures & Temperatures.
- 20% Higher rates due to broad erosion area & highly efficient cooling.
- SPECIFICATION
| GATE SEAL TYPE | 3rd(MULTI) POSITION GATE VALVE |
|---|---|
| Opeation | Pneumatic |
| Flange Size (ID) | 2.5˝ ~ 12˝ (DN63CF, DN100CF, DN160CF, DN200CF, DN250CF) |
| Flange Type | ISO, JIS, ASA, CF |
| Feedthrough | Welded Bellows |
| Gate Seal | Viton O-Ring / Kalrez O-Ring / EPDM |
| Bonnet Seal | Viton O-Ring |
| Response Time | ≤ 2 sec |
| Operate Pressure Range | 2.5˝ ~ 6˝ (DN63CF – DN160CF) : 1×10-10 mbar to 1400 mbar 8˝ ~ 12˝ (DN200CF – DN250CF) : 1×10-10 mbar to 1200 mbar |
| Differential pressure at opening | ≤ 30 mbar |
| Differential pressure on the gate | 2.5˝ ~ 6˝ (DN63CF – DN160CF) : ≤ 1400 mbar / 8˝~12″ (DN200CF – DN250CF) ≤ 1200 mbar |
| Leak rate | < 1×10-10 mbar ℓ/sec |
| Cycles until first service | 200,000 |
| Temperature for Valve Body | ≤ 200 °C |
| Temperature for Actuator | ≤ 60 °C |
| Bake Temperature | ≤ 150 °C |
| Materials | Body (Stainless Steel304) / Actuator (Al 6061Anodizing) |
| Mounting Position | Any |
| Operating Pressure (N2) | 4 ~ 7 bar |
