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TEM Plasma Cleaner
Our low-cost plasma cleaners/plasma ashers for TEM sample holders are designed specifically for fast and efficient cleaning.
- Description
- Process Results
- Plasma Environment
- Benefits
- Specification
- Downloads
Description
The TEM sample plasma cleaners/plasma ashers are fully automated and come with standard adapters which are suitable for the sample holders supplied with all the major microscope manufacturers. The plasma output power is fully variable over the range 0-100W, resulting in a very controllable & gentle cleaning process. Common sources of error inside the TEM are clearly reduced with plasma cleaning and the dwell time during the measurement is significantly increased.
TEM Plasma Cleaner / Plasma Asher options:
The TEM plasma cleaner/plasma asher is an application-specific solution for low-pressure plasma cleaning and preparation of electron microscopy samples, including:
- Low power operation
- A front feed TEM sample holder
- Multiple TEM grids and SEM stub cleaning
- Re-entrant style sample holder introduction
- Dual gas inlets for O2/Ar and other gases
TFT Colour touchscreen
Each system is supplied with a 5.7-inch colour touchscreen which provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single keypress. A handy status display and end of process audible alarm informs the user of every step in the process.
Plasma Cleaning Method
Review our Knowledge Article – Application Note ‘Examination of Effectiveness of Henniker Plasma Cleaner using a Holey Carbon Film by TEM ‘ for typical process results and detailed SEM/TEM images.
Henniker HPT-100 Plasma Cleaner with JEOL TEM sample holder adapter. Continuously variable power output from 0-100W and dual digital MFC gas mixing. Samples were introduced via the front feedthrough adapter and cleaned with Ar:O2 95:5 mixture at low power (20W and 50W) in 30sec time steps.
Vacuum chamber, power and sample holders
The TEM system features either a 100mm or 150mm diameter plasma process chamber in stainless steel, borosilicate glass or quartz glass with vacuum compatible materials throughout. The application-specific TEM system is fully automated and can be supplied with standard adapters which are suitable for the sample holders supplied with all the major microscope manufacturers.
Our proprietary, high stability HPS plasma generator is continuously variable over the entire 0-100W/0-200W power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.
Application specific
The plasma system is simple to use with a front panel touch interface providing interlocked pump down, process and vent cycles with a single keypress. Each system includes one adapter suitable for either Jeol or FEI instruments, others are available on application. A removable parts tray also allows cleaning of SEM sample stubs.
The TEM plasma cleaner/plasma asher is an application specific solution for low pressure plasma cleaning and preperation of electron microcopy samples including:
- Low power operation
- Front feed of TEM sample holder
- Multiple TEM grids and SEM stub cleaning
- Re-entrant style sample holder introduction
- Dual gas inlets for O2/Ar and other gases
| Technical Specifications | ||||||
| HPT-100 / HPT-200 TEM Plasma Cleaners | ||||||
| ENCLOSURE | ||||||
| Dimensions | HPT-100 / HPT-200 – W 520mm x H 286mm x L 550mm (+50mm on rear for cables) | |||||
| Weight | HPT-100 – ~22kg
HPT-200 – ~23kg |
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| CHAMBER | ||||||
| Material | Stainless Steel | |||||
| Form | Cylindrical | |||||
| Dimensions | HPT-100 – 100mm dia. x 280mm L
HPT-200 – 150mm dia. x 280mm L |
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| REMOVABLE PARTS CARRIER | ||||||
| Material | Aluminium | |||||
| Material options | Stainless steel | |||||
| Form | Flat tray | |||||
| Form options | Perforated tray, others to suit application | |||||
| Dimensions | HPT-100 – 90mm W x 255mm L, others to suit application
HPT-200 – 135mm W x 255mm L, others to suit application |
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| PLASMA POWER SUPPLY | ||||||
| Power | HPT-100 – 0-100W, continuously variable output
HPT-200 – 0-200W, continuously variable output |
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| Frequency | 40 kHz | |||||
| PROCESS CONTROL | ||||||
| Interface | 5.7” Colour TFT with recipe store | |||||
| Gas channels | x2 MFC | |||||
| Gas channel options | x1 vapour inlet | |||||
| Vent inlet | x1 | |||||
| Vent inlet options | soft ventilation option | |||||
| Connections | 6mm compression or 1/4″ compression | |||||
| Process timer | 1sec – 99.59min | |||||
| Pressure gauge | Pirani sensor | |||||
| Vacuum pump | 3 to 6 m3/hr pumping speed | |||||
| Vacuum pump options | 2-stage rotary pump (air/inert gas), PFPE rotary pump (oxygen compatible), dry pumps. All pumps include exhaust filter and connections | |||||
| Sample holder adapter | Includes one adapter suitable for either JEOL or FEI instruments, others on application | |||||
| SERVICES | ||||||
| Electrical | 90-250 VAC, 50-60Hz, 1200-1500 VA (including pump), fused 6.3 A T / 10 A T | |||||
| Power cord | Suited to region | |||||
| Compliance | CE – UKCA – ROHS – WEEE | |||||
| **Henniker strive for continuous improvement and specifications are subject to change without notice | ||||||
