Standard MBE systems

The PREVAC stand-alone MBE systems comprise a deposition process chamber together with a load-lock chamber for easy and fast substrate loading. It is suited for the growth of elements from groups III/V, II/VI as well as other heterostructures, and more.

A system design where the bottom flange is exchangeable is available. The whole flange can be easily replaceable using a specially designed trolley, thus a wide range of different sources configurations and options are possible for your research.