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RSH Substrate Heaters
High-Temperature Resistive Substrate Heaters
| Order Number | Description |
|---|---|
| 320001 | 2.0″ heater stage for variable sample sizes |
| 330001 | 3.0″ heater stage for variable sample sizes |
- Description
- Features
- Specifications
Description
The Bricada RSH Series Substrate Heaters are precision-engineered for uniform, high-temperature substrate heating in thin film deposition and materials processing applications. Available in configurations for both Sample and Wafer heating, the RSH Series ensures excellent temperature stability, repeatability, and process flexibility for research and production environments.
Applications:
Ideal for sputtering, laser ablation, ion beam deposition, ECR, and MOCVD processes requiring precise temperature control and uniform heating across a wide range of substrate sizes.
- High-temperature operation up to 950 °C with ±1–2% uniformity
- UHV
- Compatible with UHV and HV environments
- O₂-compatible design suitable for reactive sputtering and oxide growth
- Inconel construction for superior durability and chemical resistance
- Custom mounting stand options for X, Y, Z adjustment and integrated power & TC feedthrus
- Rapid ramp-up and stable
