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PRV NEW GEN
UHV gas inlet valve with piezo drive
- Description
- Design and Functionality
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Description
The PRV is an ultra-high vacuum (UHV) gas inlet valve designed for ease of use, precise control and minimal dead volume. Ideal for mass spectrometry applications, gas ion sources, sputtering and any UHV application requiring precise gas control, this valve offers superior performance and reliability.
Key Features:
- No manual adjustment required
- 0-10V (less than 20mA)
- Bakeable up to 100°C (if the housing is outside a bake tent it could be increased up to 150°C)
- Versatile installation: Can be installed in any location, including hard-to-reach positions
- Minimal dead volume
Standard Connections:
Inlet: 3mm Swagelok connector for gas line (CF/KF possible on request)
Outlet: DN40 CF flange for vacuum side (KF possible on request)
BNC socket for voltage connection (operates with 0-10V, less than 20mA)
The PRV is designed based on the discontinued Pfeiffer Vacuum UDV140, featuring a robust and reliable construction, no maintenance and a M5 threat at the UHV side. The valve uses two sapphire plates squeezed together, with one plate having a central hole and channel to the vacuum side. A piezo actuator lifts one side of the top sapphire plate to allow gas flow, with the flow rate controlled by the applied DC voltage.
Materials:
Sapphire and stainless steel in contact with UHV, flexible Viton gasket on the gas side.(for CF OFHC Copper Gasket, for KF Vito Sealing required)
Safety:
When the BNC connector is removed, the valve closes automatically by discharging the piezo via a resistor, or when the DC voltage is set to 0 V.
Performance:
Achieves vacuum pressures between 5E-4 mbar and <1E-8 mbar for typical laboratory gases like Ar or O2, <1E-11 mbar when gas line is evacuated.