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Magnetron power supply M600DC-PS
Compact switch-mode power supply designed to drive up to 3 magnetron sources, with support for thickness and evaporation rate measurements, vacuum measurements and mass flow controller.
- Description
- Technical Data
- Features
Description
All adjustable parameters are displayed on the large TFT display with touchscreen. All settings can be manually adjusted or can be stored and recalled automatically after unit switch on. The unit also features a built in timer and automatic standby mode. It is fully interlocked for both, user and device safety. Unit can be remotely controlled via one of available analog or digital interfaces.
| Supply voltage | 100 – 240 V, 50/60 Hz |
|---|---|
| Output voltage | up to 1200 V (from 50 V) |
| Output current | up to 1200 mA* (from 1 mA) |
| Output power | up to 600 W** (from 1 W) |
| Switch mode | 3 outputs for magnetrons |
| Analog inputs/outputs | 3 (0-10V)/3 (0-10V) |
| Digital inputs and outputs | individual programmable |
| Timer | dual mode timer 0 s – 99 h 59 m |
| Thickness and evaporation rate measurements | 1 channel for Thickness Monitors TM13/TM14 |
| Vacuum measurement | 1 channel for active vacuum gaguges: CTR90, TTR90, TTR91, TTR211, PTR225, PTR90, ITR90, ITR100, Baratron, ANALOG IN, MKS937A, PG105, MG13/14, PKR251/360/361, PCR280, ATMION |
| Mass Flow Controller | 1 channel for MKS KF1 |
| Communication interface | RS232/485, Ethernet |
| Communication protocol | MODBUS-TCP/RTU |
| User Interface | 5” TFT display with touchscreen, digital encoder |
| Interface languages | English, German, Polish |
| Dimensions | 242 x 87 x 450 mm (W x H x D), 2U 42HP |
| Weight (approx.) | 6 kg |
- Easy to extend power up to 1200 W/1800 W/2400 W with additional modules
- Switch mode for 3 magnetron sources with shutters control
- Adjustable limits of voltage, current and power separately for each output
- Multiple I/O – individual programmable
- Arc detection system
- 2D real time chart module
Support for:
- Thickness and evaporation rate measurements
- Vacuum measurements
- Mass Flow Controller
