The large chamber rotary pumped DSCR-300, desk sputter and carbon coater, with a 3 or 4-inch water-cooled magnetron cathode is a compact coating system for both sputter and carbon coating. This system is suitable for non-oxidizing targets deposition on large specimens. The water-cooled magnetron allow prolonged sputtering time, making it suitable for deposition of thick and thin layers.
With desk sputter coater model DSCR-300, one can deposit on different substrates for thin film applications such as micro and nano electronic and SEM sample preparation. It is also capable to sputter noble non-oxidizing metals (deposition material table) such as gold (Au), palladium (Pd), platinum (Pt), and gold/palladium (Au/Pd) on non-conductive or poorly conductive samples. Besides, the nano-structured specimen coated with a thin carbon film can be characterized through various techniques like FE-SEM, TEM, and EDX.
The 3-inch magnetron can be used to uniformly coat a sample of diameter up to 12 cm, and a sample with a diameter of about 15 cm can be coated with the 4-inch magnetron. Also, more than 50 SEM small stubs (1 cm dia.) can be loaded onto the 4-inch sample stage.
The DSCR-300 rotary pumped coater is configured for DC sputtering and carbon fiber (Thread) or carbon rod coating with interchangeable heads in one instrument. The full-automatic sputter and carbon coating processes allows easy, precise, and repeatable performance.
Hardware
Automation
The device is equipped with an interchangeable head to carbon coating purpose. The ability of loading three carbon fibers with a maximum diameter of 0.8 mm, allows coating carbon layer on large samples for EDX.
The DSCR-300 coater is able to perform pulsed carbon fiber evaporation. Short pulses provide more controlled deposition and significantly reduces the number of debris associated with traditional carbon deposition.
Carbon Rod Evaporation (Optional)
The DSCR-300 could be equipped with carbon rod evaporator head (Optional). For this case, an external 0-100 A high current power supply should be used instead of the internal high current power supply designed for carbon fiber evaporation.
DSCR-300, the desk SEM coater, is equipped with a 7” colored touch screen and full automatic control using a user-friendly software to control and adjust the deposition process data. The vacuum and coating sequence information can be observed as digital data or curves on the touch screen. The last 300 coatings information is saved on the history page.
The DSCR-300 can be equipped with different sample stage configurations up to 15 cm, depending on the user requirements. The standard sample stage is rotatable with adjustable height and angle and can be changed easily.
