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Omniax
The OMNIAX manipulator is a fully UHV compatible double bellows manipulator with large probe capacity. It uses the unique VACGEN hinged flange and guided support tube to eliminate deflection due to vacuum loading providing extreme stability. It’s rigidity makes it ideal for long travels, multiple rotations, specimen security and capacity for feedthroughs
- Description
- Product Details
Description
- Supports all standard sample holder configurations
- Support tube is 5x more rigid than the Transax and 25x more rigid than HPT WX
- Large load carrying capacity 20kg
- Two support tube sizes, clear bore size 50mm and 28mm
- Accepts probes up to 54mm diameter with a full ±25 mm XY travel
- Design eliminates bi-metal deformation after repeated bakeouts to 230ºC
- All axes can be manual or motor operated
- X-axis actuator can be mounted on opposite sides
- Easily removable motors for bake out
- Versatile range of XY and Z modules for bake out
- Stability and versatility due to double bellows
- Z travels from 100 mm to 1000 mm
- Operating pressure 1 bar to 10-11 mbar
- Leak rate <1×10-10 mbar l-s
- Base flange options 152 mm OD tapped or 203 mm OD clear
- Rotating support tube option with rotary feedthrough (DPRF)
- Standard feedthrough chamber included with three radial mini ports, tapped M4 and one special cooling port
- Cooling options
- Can be mounted in any orientation (support stand required)
- Clearance required underneath the OMNIAX to mount support stand on horizontal versions only
Construction advantages
- All metal re-circulating linear bearings
- All metal cross roller X and Y slide
- Extremely robust construction
