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Copper Backing Plates
| Option | Description |
|---|---|
| 010018-0 | Copper backing plate with keeper for 2.0″ |
| 010050-0 | Copper backing plate with keeper for 3.0″ |
| 010073-0 | Copper backing plate with keeper for 4.0″ |
| 010074-0 | Copper backing plate with keeper for 6.0″ |
- Description
Description
Backing Plates
Ceramics, oxides, and any other non- ma- chinable targets are commonly bonded to a copper backing plate for all sputtering sources.
SCA Backing Plates
The SCA sputter source uses the same backing plate, but with a magnetic keeper attached. The keeper holds the target in place without a mechanical clamp.
